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Author
Majer, S.
(6)
Mescheder, Ulrich
(6)
Keller, R.
(1)
Year of publication
1995
(3)
1996
(2)
1997
(1)
Document type
Conference Proceeding
(4)
Article (peer-reviewed)
(2)
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English
(4)
German
(2)
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(6)
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(6)
Keywords
Inclinometers
(1)
Micromechanics
(1)
Piezoresistance
(1)
Silicon
(1)
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Title
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Author
Simulation supported design of micromechanical sensors
(1995)
Majer, S.
;
Mescheder, Ulrich
Konzept eines planaren 2-Achsen Silizium Neigungssensors
(1995)
Majer, S.
;
Mescheder, Ulrich
Simulation supported design of micromechanical sensors
(1995)
Majer, S.
;
Mescheder, Ulrich
Micromechanical inclinometer
(1997)
Mescheder, Ulrich
;
Majer, S.
Mikromechanischer Neigungssensor für industrielle Anwendungen
(1996)
Mescheder, Ulrich
;
Majer, S.
2-Achsen Si-Neigungssensor: Simulation und Realisierung
(1996)
Mescheder, Ulrich
;
Majer, S.
;
Keller, R.
1
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6