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Charging of SiO2 Electret Film by Ion Implantation for MEMS Based Energy Harvesting Systems (2008)

Mescheder, Ulrich ; Urbanovic, P. ; Müller, Bernhard ; Baborie, Safi

Mikrostrukturierter Sensorarray zur Luftqualitätsmessung (MOSEL) (2009)

Mescheder, Ulrich ; Kovacs, Andras ; Kritwattanakhorn, Jutaphorn ; Müller, Bernhard ; Bauersfeld, Marie-Luise ; Rademacher, Sven ; Wöllenstein, Jürgen ; Ament, Christoph ; Peter, Andreas

Properties of SiO2 electret films charged by ion implantation for MEMS-based energy harvesting systems (2009)

Mescheder, Ulrich ; Müller, Bernhard ; Baborie, Safi ; Urbanovic, P.

Smart Energy: Miniaturisierte Energieversorung für autarke mikroelektronische und Mikro-Systeme (2009)

Mescheder, Ulrich ; Barborie, Safi ; Müller, Bernhard

High eficient, low cost electret charging set-up for mems based energy harvesting systems (2010)

Saad, Awad ; Mescheder, Ulrich ; Müller, Bernhard ; Nimo, Antwi

Development of a tilt actuated micromirror for applications in laser interferometry (2010)

Kronast, Wolfgang ; Mescheder, Ulrich ; Müller, Bernhard ; Nimo, Antwi ; Braxmaier, Claus ; Schuldt, Thilo

A device for 3D energy harvesting (2011)

Nimo, Antwi ; Mescheder, Ulrich ; Müller, Bernhard ; Abou Elkeir, Awad S.

Entwicklung eines quasistatischen Mikrodrehspiegels für Laserinterferometrie (2011)

Kronast, Wolfgang ; Mescheder, Ulrich ; Müller, Bernhard ; Nimo, Antwi ; Braxmaier, Claus

3D capacitive vibrational micro harvester using isotropic charging of electrets deposited on vertical sidewalls (2011)

Nimo, Antwi ; Mescheder, Ulrich ; Müller, Bernhard ; Abou Elkeir, Awad S.

Micro harvester using isotropic charging of electrets deposited on vertical sidewalls for conversion of 3D vibrational energy (2012)

Mescheder, Ulrich ; Nimo, Antwi ; Müller, Bernhard ; Abou Elkeir, Awad S.

Development of a focusing micromirror device with an in-plane stress relief structure in SOI technology (2013)

Kronast, Wolfgang ; Mescheder, Ulrich ; Müller, Bernhard ; Huster, Rolf

Developement of stress relief suspensions for micro-machined silicon membranes (2013)

Kronast, Wolfgang ; Mescheder, Ulrich ; Müller, Bernhard

Preiswerter und robuster Harvester für Vibrationsenergie (2013)

Mescheder, Ulrich ; Gu, Qingyun ; Müller, Bernhard

Entwicklung einer Stressausgleichsstruktur für spannungsarme aktive Membranspiegel in SOI Technologie (2013)

Kronast, Wolfgang ; Mescheder, Ulrich ; Müller, Bernhard ; Huster, Rolf

Energy Harvesting: Silizium-Chip zum Ernten von Energie aus Vibration (2013)

Mescheder, Ulrich ; Müller, Bernhard ; Nimo, Antwi ; Abou Elkeir, Awad S.

Development of a focusing micromirror device with an in-plane stress relief structure in silicon-on-insulator technology (2014)

Kronast, Wolfgang ; Mescheder, Ulrich ; Müller, Bernhard ; Huster, Rolf

Simulation, Fabrication and Characterization of Robust Vibrational Energy Harvester (2015)

Chauhan, Surjitsinh ; Müller, Bernhard ; Mescheder, Ulrich

Adaptiver optischer Filter bzw. spektral einstellbare Lichtquelle (2015)

Mescheder, Ulrich ; Kovacs, Andras ; Kronast, Wolfgang ; Müller, Bernhard ; Ivanov, Alexey

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