OPUS 4 | Search

"Single chip"-Sensorarray zu Luftqualitätsmessung (2005)

Ament, Christoph ; Bauersfeld, Marie-Luise ; Kovacs, Andras ; Kritwattanakhorn, Jutaphorn ; Mescheder, Ulrich ; Müller, Bernhard

3D capacitive vibrational micro harvester using isotropic charging of electrets deposited on vertical sidewalls (2011)

Nimo, Antwi ; Mescheder, Ulrich ; Müller, Bernhard ; Abou Elkeir, Awad S.

A device for 3D energy harvesting (2011)

Nimo, Antwi ; Mescheder, Ulrich ; Müller, Bernhard ; Abou Elkeir, Awad S.

Adaptiver optischer Filter bzw. spektral einstellbare Lichtquelle (2015)

Mescheder, Ulrich ; Kovacs, Andras ; Kronast, Wolfgang ; Müller, Bernhard ; Ivanov, Alexey

Charging of SiO2 Electret Film by Ion Implantation for MEMS Based Energy Harvesting Systems (2008)

Mescheder, Ulrich ; Urbanovic, P. ; Müller, Bernhard ; Baborie, Safi

Developement of stress relief suspensions for micro-machined silicon membranes (2013)

Kronast, Wolfgang ; Mescheder, Ulrich ; Müller, Bernhard

Development of a focusing micromirror device with an in-plane stress relief structure in silicon-on-insulator technology (2014)

Kronast, Wolfgang ; Mescheder, Ulrich ; Müller, Bernhard ; Huster, Rolf

Development of a focusing micromirror device with an in-plane stress relief structure in SOI technology (2013)

Kronast, Wolfgang ; Mescheder, Ulrich ; Müller, Bernhard ; Huster, Rolf

Development of a tilt actuated micromirror for applications in laser interferometry (2010)

Kronast, Wolfgang ; Mescheder, Ulrich ; Müller, Bernhard ; Nimo, Antwi ; Braxmaier, Claus ; Schuldt, Thilo

Energy Harvesting: Silizium-Chip zum Ernten von Energie aus Vibration (2013)

Mescheder, Ulrich ; Müller, Bernhard ; Nimo, Antwi ; Abou Elkeir, Awad S.

Open Access