Refine
Year of publication
Document type
- Conference Proceeding (16)
- Article (peer-reviewed) (10)
- Report (2)
Is part of the Bibliography
- Yes (28)
Keywords
- CD-ROM (5)
- Poster (3)
- Biosensor (2)
- Dual tunability (2)
- Grayscale lithography (2)
- MEMS (2)
- MOEMS (2)
- Porous silicon (2)
- Reactive ion etching (2)
- Sensor fusion (2)