Refine
Year of publication
Document type
- Conference Proceeding (48)
- Article (peer-reviewed) (16)
- Report (11)
- Contribution to a Periodical (6)
- Other (4)
- Part of a Book (2)
Is part of the Bibliography
- Yes (87) (remove)
Keywords
- CD-ROM (13)
- Porous silicon (11)
- Patent (4)
- Poster (4)
- MEMS (3)
- MOEMS (3)
- Photonic crystal (3)
- Silicon anodization (3)
- Biosensor (2)
- Dual tunability (2)
Transport mechanisms in nanostructured porous silicon layers for sensor and filter applications
(2012)
Steuerung der Peaklage und der Sensitivität von siliziumbasierten porösen optischen Multischichten
(2013)
Skalierbare Verbindungstechnik mittels anpassbarer nanoskaliger Verbindungsstrukturen (NanoBond)
(2009)
Sensorik: Porous Silicon Based Humidity Sensor with Interdigital Electrodes and Internal Heaters
(2002)
Realization and mechanical investigation of perforated and porous membranes for filter applications
(2006)
Real time In-Situ Quality Monitoring of Grinding Process using Microtechnology based Sensor Fusion
(2020)
Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
(2006)
Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
(2007)
Optimization of Microfabricated 2D Planar Spiral Microcoils for the Micro NDT of Grinding Burn
(2020)