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Author
Pongratz, S. (1)
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Year of publication
1988
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Document type
Conference Proceeding (1)
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English
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Application Of Sic-X-Ray Masks For Fabricating Sub-Micron Devices
(1988)
Mackens, U.
;
Lüthje, H.
;
Mescheder, Ulrich
;
Mund, F.
;
Pongratz, S.
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