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Author
Mackens, U. (3)
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Year of publication
1989
(2)
1988
(1)
Document type
Conference Proceeding (3)
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English
(2)
German
(1)
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Investigation Of Linewidth Uniformity In X-Ray Lithography
(1989)
Mescheder, Ulrich
;
Mackens, U.
;
Mund, F.
Röntgenstrahllithographie: Herstellung einer 0.5 μm Schaltung und Overlayuntersuchungen
(1989)
Mackens, U.
;
Mescheder, Ulrich
;
Lüthje, H.
Application Of Sic-X-Ray Masks For Fabricating Sub-Micron Devices
(1988)
Mackens, U.
;
Lüthje, H.
;
Mescheder, Ulrich
;
Mund, F.
;
Pongratz, S.
1
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3