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Author
Asplund, Maria (1)
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Year of publication
2021
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Article (peer-reviewed)
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English
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Keywords
Implants
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Iridium oxide
(1)
PE-ALD
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Thin film coating
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Plasma Enhanced Atomic Layer Deposition of Iridium Oxide for Application in Miniaturized Neural Implants
(2021)
Simon, Nicolai
;
Asplund, Maria
;
Stieglitz, Thomas
;
Bucher, Volker
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1