Refine
Year of publication
- 2014 (3) (remove)
Document type
- Article (peer-reviewed) (3) (remove)
Language
- English (3)
Is part of the Bibliography
- Yes (3)
Keywords
- MEMS (2)
- 3D photolithography (1)
- Biosensor (1)
- Direct laser writing (1)
- Dual tunability (1)
- Greyscale (1)
- MOEMS (1)
- Medical application (1)
- Photonic crystal (1)
- Porous silicon (1)