Refine
Document type
- Article (peer-reviewed) (6) (remove)
Language
- English (6) (remove)
Has full text
- No (6)
Is part of the Bibliography
- Yes (6)
Keywords
- Deformation shape (1)
- Energetic material (1)
- FEM simulation (1)
- Fatigue and crack propagation in crystalline silicon (1)
- Focusing device (1)
- Gas detectors (1)
- Lifetime (1)
- MEMS (1)
- Microelectromechanical devices (1)
- Microsensors (1)