Deutsch
Login
Open Access
Home
Search
Browse
Publish
FAQ
Volltext-Downloads (blau) und Frontdoor-Views (grau)
Schließen
Refine
Author
Mescheder, Ulrich (2)
(remove)
Year of publication
2019
(1)
2020
(1)
Document type
Article (peer-reviewed)
(2)
Language
English
(2)
Has full text
No
(2)
Is part of the Bibliography
Yes
(2)
Keywords
Grayscale lithography (2)
(remove)
2
search hits
1
to
2
Export
BibTeX
CSV
RIS
20
10
20
50
100
Sort by
Year
Year
Title
Title
Author
Author
Microfabrication of 3D Free-Forms with Textured Surface Morphology in Monocrystalline Silicon using Grayscale Technology
(2020)
Khazi, Isman M.
;
Kovacs, Andras
;
Mescheder, Ulrich
Fabrication of 3D microstructures using grayscale lithography
(2019)
Lima, Frederico
;
Khazi, Isman M.
;
Mescheder, Ulrich
;
Tungal, Alok C.
;
Muthiah, Uma
1
to
2