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Author
Mescheder, Ulrich (5)
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Year of publication
2015
(2)
1997
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2014
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2016
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Conference Proceeding
(3)
Article (peer-reviewed)
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English
(5)
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Silicon (5)
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Bonding Mechanism in the Velcro Concept Si-Si Low Temperature Direct Bonding Technique
(2015)
Keshavarzi, Shervin
;
Mescheder, Ulrich
;
Reinecke, Holger
Characterisation and simulation of low temperature Si-Si direct bonding through velcro-like surfaces based on porous silicon
(2014)
Keshavarzi, Shervin
;
Mescheder, Ulrich
;
Reinecke, Holger
Investigation of plastic electrode tools for electrochemical machining of silicon
(2016)
Lyubimov, Victor V.
;
Volgin, Vladimir M.
;
Mescheder, Ulrich
;
Gnidina, Inna V.
;
Ivanov, Alexey
Micromechanical inclinometer
(1997)
Mescheder, Ulrich
;
Majer, S.
Primary Current Distribution Model for Electrochemical Etching of Silicon Through a Circular Opening
(2015)
Ivanov, Alexey
;
Mescheder, Ulrich
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