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Author
Estan, Carlos (2)
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Year of publication
2005
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2006
(1)
Document type
Article (peer-reviewed)
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Conference Proceeding
(1)
Language
English (2)
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(2)
Is part of the Bibliography
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(2)
Keywords
FEM simulation
(2)
MOEMS
(2)
SOI
(2)
Electrostatic focusing device
(1)
Electrostatic focusing device
(1)
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Distortion optimized focusing mirror device with large aperture
(2006)
Mescheder, Ulrich
;
Estan, Carlos
;
Somogyi, Gergoe
;
Freudenreich, Markus
MOEMS focusing device with ideal parabolic deflection shape
(2005)
Mescheder, Ulrich
;
Estan, Carlos
;
Somogyi, Gergoe
;
Freudenreich, Markus
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