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Author
Huster, Rolf (5)
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Year of publication
2002
(1)
2005
(1)
2008
(1)
2013
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2014
(1)
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Conference Proceeding
(4)
Article (peer-reviewed)
(1)
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English (5)
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3D structuring of c-Si using porous silicon as sacrificial material
(2002)
Mescheder, Ulrich
;
Kovacs, Andras
;
Fahad, A.
;
Huster, Rolf
3-D Micro Free-Form Manufacturing in Silicon Micro-Free- Form Production for Plastics Moulding Technology
(2005)
Huster, Rolf
;
Kovacs, Andras
;
Mescheder, Ulrich
Optimisation and characterisation of parabolic membrane mirrors
(2008)
Hellmuth, T.
;
Khrennikov, Konstantin
;
Kronast, Wolfgang
;
Huster, Rolf
;
Mescheder, Ulrich
Development of a focusing micromirror device with an in-plane stress relief structure in SOI technology
(2013)
Kronast, Wolfgang
;
Mescheder, Ulrich
;
Müller, Bernhard
;
Huster, Rolf
Development of a focusing micromirror device with an in-plane stress relief structure in silicon-on-insulator technology
(2014)
Kronast, Wolfgang
;
Mescheder, Ulrich
;
Müller, Bernhard
;
Huster, Rolf
1
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5