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Author
Kovacs, Adam (1)
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2008 (1)
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Article (peer-reviewed)
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English
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Critical pressure
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Microsieve
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Silicon-nitride membrane
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Estimation of elasticity modulus and fracture strength of thin perforated SiN membranes with finite element simulations
(2008)
Kovacs, Adam
;
Kovacs, Andras
;
Mescheder, Ulrich
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