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Ivanov, Alexey (2)
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2011 (2)
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High quality 3D shapes by silicon anodization
(2011)
Ivanov, Alexey
;
Kovacs, Andras
;
Mescheder, Ulrich
Silicon Electrochemical Etching for 3D Microforms with High Quality Surfaces
(2011)
Ivanov, Alexey
;
Mescheder, Ulrich
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