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Author
Mescheder, Ulrich (6)
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Year of publication
2014
(3)
2001
(1)
2018
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2021
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Article (peer-reviewed)
(4)
Conference Proceeding
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English
(6)
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MEMS (6)
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Porous silicon as multifunctional material in MEMS
(2001)
Mescheder, Ulrich
;
Kovacs, Andras
;
Kronast, Wolfgang
;
Barsony, Istvan
;
Adam, Maria
;
Dücsö, Cs.
Tunable optical filters with wide wavelength range based on porous multilayers
(2014)
Mescheder, Ulrich
;
Khazi, Isman M.
;
Kovacs, Andras
;
Ivanov, Alexey
MOEMS based concept for miniaturized monochromators, spectrometers and tunable light sources
(2014)
Mescheder, Ulrich
;
Khazi, Isman M.
;
Kovacs, Andras
;
Ivanov, Alexey
Process Development For 3D Laser Lithography
(2014)
Kaste, Nigol
;
Filbert, Alexander
;
Mescheder, Ulrich
;
Rang, Toomas
;
Rang, Galina
Sequential Nano-Explosion Using Patterned Porous Silicon
(2018)
Keshavarzi, Shervin
;
Lima, Frederico
;
Kronast, Wolfgang
;
Mescheder, Ulrich
Investigation of the Dynamics of a 2-DoF Actuation Unit Cell for a Cooperative Electrostatic Actuation System
(2021)
Albukhari, Almothana
;
Mescheder, Ulrich
1
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