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Mescheder, Ulrich (130)
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Conference Proceeding (130)
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Title
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Author
Electro‐optical effects on the absorption edge of a‐Si:H
(1984)
Mescheder, Ulrich
;
Weiser, G.
Application Of Sic-X-Ray Masks For Fabricating Sub-Micron Devices
(1988)
Mackens, U.
;
Lüthje, H.
;
Mescheder, Ulrich
;
Mund, F.
;
Pongratz, S.
Röntgenstrahllithographie: Herstellung einer 0.5 μm Schaltung und Overlayuntersuchungen
(1989)
Mackens, U.
;
Mescheder, Ulrich
;
Lüthje, H.
Submikrometer Linienbreitenmetrologie hoher Genauigkeit
(1989)
Mescheder, Ulrich
;
Werner, K.
Investigation Of Linewidth Uniformity In X-Ray Lithography
(1989)
Mescheder, Ulrich
;
Mackens, U.
;
Mund, F.
Maskenmetrologie: Anforderungen und Trends
(1991)
Zander, M.
;
Mescheder, Ulrich
Simulation supported design of micromechanical sensors
(1995)
Majer, S.
;
Mescheder, Ulrich
Konzept eines planaren 2-Achsen Silizium Neigungssensors
(1995)
Majer, S.
;
Mescheder, Ulrich
2-Achsen Si-Neigungssensor: Simulation und Realisierung
(1996)
Mescheder, Ulrich
;
Majer, S.
;
Keller, R.
Mikromechanischer Neigungssensor für industrielle Anwendungen
(1996)
Mescheder, Ulrich
;
Majer, S.
Photometric device for control of micromechanical elements manufacturing
(1996)
Kolgin, E. A.
;
Tumanov, I. A.
;
Ukhov, A. A.
;
Mescheder, Ulrich
Optische Insitu-Prozesskontrolle beim anisotropen Ätzen von Si-Membranen
(1998)
Mescheder, Ulrich
;
Kötter, C.
;
Kolguin, E.
;
Oukhov, A.
Optical monitoring and control of Si wet etching
(1998)
Mescheder, Ulrich
;
Kötter, Christiane
Piezoelectric Inch Worm Motor with Monolithically Integrated Driving Block
(1998)
Mescheder, Ulrich
;
Kötter, Christiane
;
Katzenstein, B.
Simulation of a Micro-Fabricated Inclinometer
(2000)
Reichardt, M.
;
Mescheder, Ulrich
;
Nosseir, Nagy
Surface Micromachining Process for C-Si as Active Material
(2001)
Kovacs, Andras
;
Mescheder, Ulrich
Porous silicon as multifunctional material in MEMS
(2001)
Mescheder, Ulrich
;
Kovacs, Andras
;
Kronast, Wolfgang
;
Barsony, Istvan
;
Adam, Maria
;
Dücsö, Cs.
Local Laser Bonding for Low Temperature Budget
(2001)
Mescheder, Ulrich
;
Alavi, M.
;
Hiltmann, K.
;
Lizeau, Ch.
;
Nachtigall, Christoph
;
Sandmaier, H.
3D structuring of c-Si using porous silicon as sacrificial material
(2002)
Mescheder, Ulrich
;
Kovacs, Andras
;
Fahad, A.
;
Huster, Rolf
Reliability Investigations in Micromechanical Devices
(2002)
Mescheder, Ulrich
;
Kronast, Wolfgang
;
Naychuk, N.
1
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20