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Author
Passlack, Ulrike (3)
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Year of publication
2021
(2)
2020
(1)
Document type
Conference Proceeding (3)
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Language
English
(3)
Has full text
No
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Is part of the Bibliography
Yes
(3)
Keywords
Atomic layer deposition
(1)
Polyimides
(1)
Silicon
(1)
Substrates
(1)
Surface treatment
(1)
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Flexible Ultra-Thin Chip-Film Patch for Integration of Electronic Components for Biomedical Applications
(2021)
Passlack, Ulrike
;
Simon, Nicolai
;
Bucher, Volker
;
Harendt, Christine
;
Burghartz, Joachim N.
Qualification of the Barrier Properties of ALD-coated Polymer Films with Humidity Sensors
(2021)
Simon, Nicolai
;
Passlack, Ulrike
;
Stieglitz, Thomas
;
Blendinger, Felix
;
Bucher, Volker
Investigation of Long-Term Stability of Hybrid Systems-in-Foil (HySiF) for Biomedical Applications
(2020)
Passlack, Ulrike
;
Simon, Nicolai
;
Bucher, Volker
;
Harendt, Christine
;
Stieglitz, Thomas
;
Burghartz, Joachim N.
1
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3