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Author
Ivanov, Alexey
(2)
Mescheder, Ulrich
(2)
Kovacs, Andras
(1)
Year of publication
2015
(1)
2016
(1)
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Conference Proceeding
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(1)
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English (2)
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Electrochemical etching (2)
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Application of local backside contacts for structuring Of silicon with anodization: simulation and experiments
(2016)
Ivanov, Alexey
;
Kovacs, Andras
;
Mescheder, Ulrich
Primary Current Distribution Model for Electrochemical Etching of Silicon Through a Circular Opening
(2015)
Ivanov, Alexey
;
Mescheder, Ulrich
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