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Author
Huster, Rolf (1)
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2014
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Article (peer-reviewed) (1)
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English
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Development of a focusing micromirror device with an in-plane stress relief structure in silicon-on-insulator technology
(2014)
Kronast, Wolfgang
;
Mescheder, Ulrich
;
Müller, Bernhard
;
Huster, Rolf
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