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Author
Barth, W.
(1)
Bauerdick, S.
(1)
Bucher, Volker
(1)
Burkhardt, Claus J.
(1)
Nisch, Wilfried
(1)
Rudorf, R.
(1)
Year of publication
2003
(1)
Document type
Article (peer-reviewed)
(1)
Language
English
(1)
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Keywords
Electron beam induced deposition (1)
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In-situ monitoring of electron beam induced deposition by atomic force microscopy in a scanning electron microscope
(2003)
Bauerdick, S.
;
Burkhardt, Claus J.
;
Rudorf, R.
;
Barth, W.
;
Bucher, Volker
;
Nisch, Wilfried
1
to
1