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Author
Bauersfeld, Marie-Luise (1)
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Year of publication
2007
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Article (peer-reviewed) (1)
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Language
English
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Keywords
Adhesion and diffusion barrier
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Electrochemical etching process
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Multifunctional sensor systems
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Platinum
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Porous silicon
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Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
(2007)
Kritwattanakhorn, Jutaphorn
;
Bauersfeld, Marie-Luise
;
Kovacs, Andras
;
Müller, Bernhard
;
Mescheder, Ulrich
;
Rademacher, Sven
;
Wöllenstein, Jürgen
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