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Transport mechanisms in nanostructured porous silicon layers for sensor and filter applications
(2012)
The charge response of a force applied to piezoelectric stack actuators was characterized in the range of 0 N – 20 N for application in piezoelectric self-sensing. Results show linear behavior between ap-plied force and collected charge for both actuators tested in this study. One actuator exhibits a 3.55 times higher sensitivity slope than the other related to its larger capacitance. An error analysis reveals a reduction of relative error in charge measurement with rising forces applied to the actuators.
Steuerung der Peaklage und der Sensitivität von siliziumbasierten porösen optischen Multischichten
(2013)
Smart Energy: Miniaturisierte Energieversorung für autarke mikroelektronische und Mikro-Systeme
(2009)
Skalierbare Verbindungstechnik mittels anpassbarer nanoskaliger Verbindungsstrukturen (NanoBond)
(2009)
Sensorik: Porous Silicon Based Humidity Sensor with Interdigital Electrodes and Internal Heaters
(2002)
Semi-rigid ring-shaped electrode dielectric electroactive polymer membrane as buckling actuator
(2019)
Realization and mechanical investigation of perforated and porous membranes for filter applications
(2006)
Real time In-Situ Quality Monitoring of Grinding Process using Microtechnology based Sensor Fusion
(2020)
Primary Current Distribution Model for Electrochemical Etching of Silicon Through a Circular Opening
(2015)
Optische Charakterisierung von Stress-relaxierten aktiven MOEMS-Membranspiegeln mit großer Apertur
(2015)
Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
(2006)
Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
(2007)
Optimization of Microfabricated 2D Planar Spiral Microcoils for the Micro NDT of Grinding Burn
(2020)