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Author
Mescheder, Ulrich (2)
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Year of publication
2001
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2023
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Article (peer-reviewed)
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Conference Proceeding
(1)
Language
English
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Microsystems (2)
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Inchworm Motors and Beyond: A Review on Cooperative Electrostatic Actuator Systems
(2023)
Albukhari, Almothana
;
Mescheder, Ulrich
Porous silicon as multifunctional material in MEMS
(2001)
Mescheder, Ulrich
;
Kovacs, Andras
;
Kronast, Wolfgang
;
Barsony, Istvan
;
Adam, Maria
;
Dücsö, Cs.
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