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Semi-rigid ring-shaped electrode dielectric electroactive polymer membrane as buckling actuator
(2019)
Flexible piezoresistive PDMS metal-thin-film sensor-concept for stiffness evaluation of soft tissues
(2019)
In-situ SEM analysis tool for stretchable metal-elastomer-laminate-membranes for flexible sensors
(2023)
Movement giver
(2001)
In this work, we characterise a flexural mechanical amplifier, which is used for the realisation of a miniaturised piezoelectric inchworm motor designed for large force (some N) and stroke (tens of mm) operation as it is required e.g., for medical implants. The characterisation is based on high precision optical displacement measurements and a force self-sensing approach. An optically measured displacement of 292 nm in lateral direction and 910 nm in vertical direction of the flexural mechanical amplifier has been obtained, corresponding to a deflection attenuation factor of 3.1. Piezoelectric self-sensing of force was used to determine a force amplification factor of 3.43 from the mechanical oval structure.
The charge response of a force applied to piezoelectric stack actuators was characterized in the range of 0 N – 20 N for application in piezoelectric self-sensing. Results show linear behavior between ap-plied force and collected charge for both actuators tested in this study. One actuator exhibits a 3.55 times higher sensitivity slope than the other related to its larger capacitance. An error analysis reveals a reduction of relative error in charge measurement with rising forces applied to the actuators.
Micromechanical inclinometer
(1997)
Sensorik: Porous Silicon Based Humidity Sensor with Interdigital Electrodes and Internal Heaters
(2002)
Influence of current density on the adhesion of seedless electrodeposited copper layers on silicon
(2019)
Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
(2006)
Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
(2007)
Realization and mechanical investigation of perforated and porous membranes for filter applications
(2006)
Transport mechanisms in nanostructured porous silicon layers for sensor and filter applications
(2012)
Mechanical investigation of perforated and porous membranes for micro- and nanofilter applications
(2007)
The approach of using current transients to model the nucleation rate as reported in the seminal work of Scharifker and Mostany is limited to electrodeposition system without bath hydrodynamics (BHD). Therefore, in this work in situ electroanalytical approach is proposed to unveil the influence of BHD on the nucleation kinetics of electrochemically deposited Nickel-Cobalt alloy system (eNiCo). Using the Hydrodynamic linear sweep voltammetry (HLSV) technique, the limiting current density as a function of BHD is computed, wherein it increased (for eNiCo alloys) from 186 mA/cm² to 222.6 mA/cm² on increasing BHD from 0 to 42 cm/s, respectively. Consecutively, the diffusion layer thickness is found to decrease from 19 µm to ca. 15.8 µm on increasing BHD from 0 to 42 cm/s, respectively. Additionally, from Nyquist plots recorded using the Galvanostatic Electrochemical Impedance Spectroscopy (GEIS), the charge transfer coefficient (Rct), exchange current density (io) and double layer capacitance (Cdl) as a function of BHD is computed. It is found that Rct decreased and io, Cdl increased as function of BHD. Thereby, indicating the enhancement in the charge transfer on the cathode surface and reduction in the thickness of the diffusion layer. Hence, with the use of BHD, it is possible to control the growth kinetics, therefore enabling the deposition of tailor-made materials possessing specific required properties.
The influence of bath hydrodynamics on the resultant micromechanical properties of electrodeposited nickel-cobalt alloy system is investigated. The bath hydrodynamics realized by magnetic stirring is simulated using COMSOL Multiphysics and a region of minimum variation in velocity within the electrolytic cell is determined and validated experimentally. Nickel-cobalt alloy and nickel coating samples are deposited galvanostatically (50 mA/cm2) with varying bath velocity (0 to 42 cm/s). The surface morphology of samples gradually changed from granular (fractal dimension 2.97) to more planar (fractal dimension 2.15) growth type, and the according average roughness decreased from 207.5 nm to 11 nm on increasing the electrolyte velocity from 0 to 42 cm/s for nickel-cobalt alloys; a similar trend was also found in the case of nickel coatings. The calculated grain size from the X-ray diffractograms decreased from 31 nm to 12 nm and from 69 nm to 26 nm as function of increasing velocity (up to 42 cm/s) for nickel-cobalt and nickel coatings, respectively. Consecutively, the measured Vickers microhardness values increased by 43% (i.e., from 393 HV0.01 to 692 HV0.01) and by 33% (i.e., from 255 HV0.01 to 381 HV0.01) for nickel-cobalt and nickel coatings, respectively, which fits well with the Hall–Petch relation.