Refine
Year of publication
Document type
- Conference Proceeding (130)
- Article (peer-reviewed) (66)
- Report (34)
- Contribution to a Periodical (13)
- Other (9)
- Part of a Book (5)
- Book (2)
Language
- English (165)
- German (93)
- Multiple languages (1)
Keywords
- CD-ROM (28)
- Porous silicon (15)
- Poster (11)
- Patent (9)
- MEMS (6)
- MOEMS (6)
- Silicon (5)
- FEM simulation (3)
- Needles (3)
- Photonic crystal (3)
Micromechanical inclinometer
(1997)
Charakterisierung eines bi-stabilen Schalters mit großem Schaltweg und einstellbaren Haltekräften
(2005)
Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
(2007)
Mechanical investigation of perforated and porous membranes for micro- and nanofilter applications
(2007)
Realization and mechanical investigation of perforated and porous membranes for filter applications
(2006)