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Micromechanical inclinometer
(1997)
Bewegungsgeber
(2000)
Aktorik: Nanomotor
(2000)
Movement giver
(2001)
Bewegungsgeber
(2001)
Sensorik: Porous Silicon Based Humidity Sensor with Interdigital Electrodes and Internal Heaters
(2002)
Charakterisierung eines bi-stabilen Schalters mit großem Schaltweg und einstellbaren Haltekräften
(2005)
Mikrosystemtechnik: Mikrotechnische hergestelltes aktiv-optisches System für Fokussieraufgaben
(2005)
Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
(2006)
Realization and mechanical investigation of perforated and porous membranes for filter applications
(2006)
Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
(2007)