Deutsch
Login
Open Access
Home
Search
Browse
Publish
FAQ
Volltext-Downloads (blau) und Frontdoor-Views (grau)
Schließen
Refine
Author
Kötter, Christiane (5)
(remove)
Year of publication
1998
(4)
1999
(1)
Document type
Conference Proceeding
(2)
Article (peer-reviewed)
(1)
Other
(1)
Report
(1)
Language
English
(3)
German
(2)
Has full text
No
(5)
Is part of the Bibliography
Yes (5)
(remove)
Keywords
Inch worm
(1)
Light-controlled etch rate
(1)
Optical monitoring of etch rate
(1)
Patent
(1)
Piezoelectric actuator
(1)
Piezoelectric stepping motor
(1)
Silicon micromachining
(1)
piezoelektrischer Schrittmotor
(1)
5
search hits
1
to
5
Export
BibTeX
CSV
RIS
100
10
20
50
100
Sort by
Year
Year
Title
Title
Author
Author
Verfahren und Vorrichtung zur photoinduzierten Kontrolle des anisotropen Ätzens von kristallinem Silizium
(1998)
Mescheder, Ulrich
;
Kötter, Christiane
Piezoelectric Inch Worm Motor with Monolithically Integrated Driving Block
(1998)
Mescheder, Ulrich
;
Kötter, Christiane
;
Katzenstein, B.
Piezoelectric inch worm motor with monolithically integrated driving block
(1998)
Mescheder, Ulrich
;
Kötter, Christiane
;
Katzenstein, B.
;
Lang, T.
Optical monitoring and control of Si wet etching
(1998)
Mescheder, Ulrich
;
Kötter, Christiane
Optical monitoring and control of Si wet etching
(1999)
Mescheder, Ulrich
;
Kötter, Christiane
1
to
5