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In-situ SEM analysis tool for stretchable metal-elastomer-laminate-membranes for flexible sensors
(2023)
The charge response of a force applied to piezoelectric stack actuators was characterized in the range of 0 N – 20 N for application in piezoelectric self-sensing. Results show linear behavior between ap-plied force and collected charge for both actuators tested in this study. One actuator exhibits a 3.55 times higher sensitivity slope than the other related to its larger capacitance. An error analysis reveals a reduction of relative error in charge measurement with rising forces applied to the actuators.
In this work, we characterise a flexural mechanical amplifier, which is used for the realisation of a miniaturised piezoelectric inchworm motor designed for large force (some N) and stroke (tens of mm) operation as it is required e.g., for medical implants. The characterisation is based on high precision optical displacement measurements and a force self-sensing approach. An optically measured displacement of 292 nm in lateral direction and 910 nm in vertical direction of the flexural mechanical amplifier has been obtained, corresponding to a deflection attenuation factor of 3.1. Piezoelectric self-sensing of force was used to determine a force amplification factor of 3.43 from the mechanical oval structure.