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Author
Mescheder, Ulrich (2)
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2009 (2)
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Article (peer-reviewed) (2)
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English
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Investigation of humidity adsorption in porous silicon layers
(2009)
Kovacs, Andras
;
Meister, Dirk
;
Mescheder, Ulrich
Properties of SiO2 electret films charged by ion implantation for MEMS-based energy harvesting systems
(2009)
Mescheder, Ulrich
;
Müller, Bernhard
;
Baborie, Safi
;
Urbanovic, P.
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