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Author
Alavi, M. (2)
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Year of publication
2001
(1)
2002
(1)
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Article (peer-reviewed)
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Conference Proceeding
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English
(2)
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Keywords
Laser micromachining
(2)
Wafer bonding
(2)
Eutectic bonding
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Local laser bonding for low temperature budget
(2002)
Mescheder, Ulrich
;
Alavi, M.
;
Hiltmann, K.
;
Lietzau, Ch.
;
Nachtigall, Christoph
;
Sandmaier, H.
Local Laser Bonding for Low Temperature Budget
(2001)
Mescheder, Ulrich
;
Alavi, M.
;
Hiltmann, K.
;
Lizeau, Ch.
;
Nachtigall, Christoph
;
Sandmaier, H.
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