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Author
Mescheder, Ulrich (2)
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2014 (2)
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Forschungsgebiet Mikrosystemtechnik im Forschungsschwerpunkt Smart Systems
(2014)
Mescheder, Ulrich
Finite-Elements Simulation of Etch Front Propagation in Silicon Electropolishing Process
(2014)
Ivanov, Alexey
;
Mescheder, Ulrich
;
Woias, Peter
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