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Author
Mescheder, Ulrich
(3)
Deigner, Hans-Peter
(2)
Mackens, U.
(2)
Bruns, A.
(1)
Constantinescu, Take
(1)
Dammel, R.
(1)
Dresel, Hans A.
(1)
Frübis, J.
(1)
Harms, H.
(1)
Krieger, Claus
(1)
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1990 (5)
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Article (peer-reviewed) (5)
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Influence of X-ray mask repair on pattern placement accuracy
(1990)
Schaffer, H.
;
Mescheder, Ulrich
;
Weigmann, U.
;
Petzold, H.-C.
A Convenient Solid-Support Procedure for the Synthesis of Symmetric Disulphides. The Configuration of Aromatic Carben Atoms in the 1,6-Methano[10]annulene Framework
(1990)
Neidlein, Richard
;
Constantinescu, Take
;
Krieger, Claus
;
Deigner, Hans-Peter
Application of positive and negative tone x-ray resist for 0.5μm CMOS device fabrication
(1990)
Mescheder, Ulrich
;
Mackens, U.
;
Lifka, H.
;
Dammel, R.
;
Pawloski, G.
;
Theis, J.
X-ray mask technology: Precise etching of sub-half-micron tungsten absorber features
(1990)
Lüthje, H.
;
Bruns, A.
;
Harms, H.
;
Köhler, I.
;
Mescheder, Ulrich
;
Mackens, U.
;
Stuck, T.
LDL-metabolism of the arterial wall-new implications for atherogenesis
(1990)
Dresel, Hans A.
;
Deigner, Hans-Peter
;
Frübis, J.
;
Strein, K.
;
Schettler, G.
1
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5