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Author
Kovacs, Adam
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Kovacs, Andras
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Mescheder, Ulrich
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Vizvary, Zsolt
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Year of publication
2006
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Conference Proceeding (1)
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English (1)
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Perforated silicon nitride (1)
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Large Defection Analysis of Perforated Silicon Nitride Membranes
(2006)
Kovacs, Adam
;
Vizvary, Zsolt
;
Kovacs, Andras
;
Mescheder, Ulrich
1
to
1