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Author
Kötter, Christiane (3)
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Year of publication
1998
(2)
1999
(1)
Document type
Conference Proceeding
(2)
Article (peer-reviewed)
(1)
Language
English (3)
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Has full text
No
(3)
Is part of the Bibliography
Yes
(3)
Keywords
Light-controlled etch rate
(1)
Optical monitoring of etch rate
(1)
Silicon micromachining
(1)
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Title
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Author
Optical monitoring and control of Si wet etching
(1998)
Mescheder, Ulrich
;
Kötter, Christiane
Optical monitoring and control of Si wet etching
(1999)
Mescheder, Ulrich
;
Kötter, Christiane
Piezoelectric Inch Worm Motor with Monolithically Integrated Driving Block
(1998)
Mescheder, Ulrich
;
Kötter, Christiane
;
Katzenstein, B.
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