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Author
Müller, Bernhard (5)
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Year of publication
2003
(1)
2007
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2009
(1)
2012
(1)
2014
(1)
Document type
Article (peer-reviewed) (5)
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Language
English
(5)
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Keywords
Porous silicon
(2)
Adhesion and diffusion barrier
(1)
Effective heating
(1)
Electrochemical etching process
(1)
Humidity sensor
(1)
Multifunctional sensor systems
(1)
Platinum
(1)
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Title
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Properties of SiO2 electret films charged by ion implantation for MEMS-based energy harvesting systems
(2009)
Mescheder, Ulrich
;
Müller, Bernhard
;
Baborie, Safi
;
Urbanovic, P.
Porous silicon-based humidity sensor with interdigital electrodes and internal heaters
(2003)
Fürjes, P.
;
Kovacs, Andras
;
Dücsö, Cs.
;
Adam, Maria
;
Müller, Bernhard
;
Mescheder, Ulrich
Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
(2007)
Kritwattanakhorn, Jutaphorn
;
Bauersfeld, Marie-Luise
;
Kovacs, Andras
;
Müller, Bernhard
;
Mescheder, Ulrich
;
Rademacher, Sven
;
Wöllenstein, Jürgen
Micro harvester using isotropic charging of electrets deposited on vertical sidewalls for conversion of 3D vibrational energy
(2012)
Mescheder, Ulrich
;
Nimo, Antwi
;
Müller, Bernhard
;
Abou Elkeir, Awad S.
Development of a focusing micromirror device with an in-plane stress relief structure in silicon-on-insulator technology
(2014)
Kronast, Wolfgang
;
Mescheder, Ulrich
;
Müller, Bernhard
;
Huster, Rolf
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5