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Author
Khazi, Isman M.
(2)
Mescheder, Ulrich
(2)
Kovacs, Andras
(1)
Lima, Frederico
(1)
Muthiah, Uma
(1)
Tungal, Alok C.
(1)
Year of publication
2019
(1)
2020
(1)
Document type
Article (peer-reviewed)
(2)
Language
English
(2)
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No
(2)
Is part of the Bibliography
Yes
(2)
Keywords
Grayscale lithography (2)
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Microfabrication of 3D Free-Forms with Textured Surface Morphology in Monocrystalline Silicon using Grayscale Technology
(2020)
Khazi, Isman M.
;
Kovacs, Andras
;
Mescheder, Ulrich
1
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1