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Metzger, Michael (9)
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Atomic layer deposition (ALD)
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Atomic-layer deposition (ALD)
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Low-temperature atomic-layer deposited oxide on titanium nitride electrodes enables culture and physiological recording of electrogenic cells
(2020)
Dollt, Michele
;
Reh, Miriam
;
Metzger, Michael
;
Heusel, Gerhard
;
Kriebel, Martin
;
Bucher, Volker
;
Zeck, Günther
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