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Lüthje, H. (5)
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1989
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1986
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Article (peer-reviewed)
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Conference Proceeding
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English
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German
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Stability of SiC-masks for high resolution synchrotron X-ray lithography
(1986)
Lüthje, H.
;
Mackens, U.
;
Mescheder, Ulrich
;
Matthießen, B.
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