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Author
Kritwattanakhorn, Jutaphorn (9)
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2007
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Conference Proceeding
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German
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Keywords
Adhesion and diffusion barrier
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CD-ROM
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Electrochemical etching process
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Multifunctional sensor systems
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Platinum
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Porous silicon
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Mikrosystemtechnik: Sensorarray zur Lufqualitätsmessung
(2007)
Kritwattanakhorn, Jutaphorn
;
Kovacs, Andras
;
Mescheder, Ulrich
;
Müller, Bernd
;
Ament, Christoph
;
Peter, Andreas
;
Bauersfeld, Marie-Luise
;
Rademacher, Sven
;
Wöllenstein, Jürgen
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