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Author
Estan, Carlos (4)
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Year of publication
2005
(3)
2006
(1)
Document type
Article (peer-reviewed)
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Conference Proceeding
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Contribution to a Periodical
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Report
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Language
German
(2)
English
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Has full text
No (4)
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Is part of the Bibliography
Yes
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Keywords
FEM simulation
(2)
MOEMS
(2)
SOI
(2)
Electrostatic focusing device
(1)
Electrostatic focusing device
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Mikrosystemtechnik: Mikrotechnische hergestelltes aktiv-optisches System für Fokussieraufgaben
(2005)
Mescheder, Ulrich
;
Somogyi, Gergoe
;
Freudenreich, Markus
;
Estan, Carlos
;
Török, Zoltan
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