Refine
Document type
- Article (peer-reviewed) (4) (remove)
Language
- English (4)
Is part of the Bibliography
- Yes (4)
Keywords
- Biosensor (1)
- Dual tunability (1)
- MEMS (1)
- MOEMS (1)
- Metal coating (1)
- Micro electrochemical machining (1)
- Photonic crystal (1)
- Plastic electrode-tool (1)
- Porous silicon (1)
- Silicon (1)