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Investigation of material removal mechanisms of laser-structured Si3N4 via single diamond grit scratching

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Author:Masih Paknejad, Bahman AzarhoushangORCiDGND, Ali ZahediORCiDGND, Mehdi Khakrangin, Mohammadali Kadivar
URN:https://urn:nbn:de:bsz:fn1-opus4-93767
DOI:https://doi.org/10.1007/s00170-022-10793-0
ISSN:1433-3015
Parent Title (English):The International Journal of Advanced Manufacturing Technology
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2023
Release Date:2023/04/17
Tag:Laser structuring; Material removal mechanism; Silicon nitride; Single diamond grit scratching; Specific cutting energy; Ultrashort-pulse laser
Volume:125.2023
Issue:5-6
First Page:2759
Last Page:2775
Open-Access-Status: Open Access 
 Hybrid 
Licence (German):License LogoCreative Commons - CC BY - Namensnennung 4.0 International