Area-Selective Etching of Parylene-C on Platinum Surfaces
Author: | Nicolai Simon, Thomas Stieglitz, Volker BucherORCiDGND |
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URL: | https://www.conftool.org/bmt2024/index.php?page=browseSessions&search=Area-Selective+Etching+of+Parylene-C+on+Platinum+Surfaces |
Parent Title (English): | BMT 2024 : 58th Annual Conference of the German Society for Biomedical Engineering, 18.-20. September 2024, Suttgart, Germany |
Document Type: | Conference Proceeding |
Language: | English |
Year of Completion: | 2024 |
Release Date: | 2024/10/08 |
Licence (German): | Urheberrechtlich geschützt |