Area-Selective Etching of Parylene-C on Platinum Surfaces
| Document Type: | Conference Proceeding |
|---|---|
| Author: | Nicolai SimonORCiDGND, Thomas Stieglitz, Volker BucherORCiDGND |
| URL: | https://www.conftool.org/bmt2024/index.php?page=browseSessions&search=Area-Selective+Etching+of+Parylene-C+on+Platinum+Surfaces |
| Parent Title (English): | BMT 2024 : 58th Annual Conference of the German Society for Biomedical Engineering, 18.-20. September 2024, Suttgart, Germany |
| Language: | English |
| Year of Completion: | 2024 |
| Release Date: | 2024/10/08 |
| Licence (German): |  Urheberrechtlich geschützt |