Surface Passivated Porous Silicon-Based Antireflective Coating
| Author: | Shervin KeshavarziORCiDGND, Andras KovacsORCiDGND, Ulrich MeschederORCiDGND |
|---|---|
| Parent Title (English): | MikroSystemTechnik Kongress 2023, 23. - 25. Oktober 2023, Dresden, Germany |
| Document Type: | Conference Proceeding |
| Language: | English |
| Year of Completion: | 2023 |
| Release Date: | 2024/01/09 |
| Tag: | Poster |
| Licence (German): |  Urheberrechtlich geschützt |