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In-situ SEM analysis tool for stretchable metal-elastomer-laminate-membranes for flexible sensors

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Metadaten
Author:Benjamin Sittkus, Ulrich MeschederORCiDGND
Parent Title (English):MikroSystemTechnik Kongress 2023, 23. - 25. Oktober 2023, Dresden, Germany
Document Type:Conference Proceeding
Language:English
Year of Completion:2023
Release Date:2024/01/09
Tag:Poster
Licence (German):License LogoUrheberrechtlich geschützt