In-situ SEM analysis tool for stretchable metal-elastomer-laminate-membranes for flexible sensors
Author: | Benjamin Sittkus, Ulrich MeschederORCiDGND |
---|---|
Parent Title (English): | MikroSystemTechnik Kongress 2023, 23. - 25. Oktober 2023, Dresden, Germany |
Document Type: | Conference Proceeding |
Language: | English |
Year of Completion: | 2023 |
Release Date: | 2024/01/09 |
Tag: | Poster |
Licence (German): | Urheberrechtlich geschützt |