Novel method for plasma etching of printed circuit boards as alternative for fluorocarbon gases
| Document Type: | Article (peer-reviewed) |
|---|---|
| Author: | Wolfram KintzelGND, Marvin Schmid, Achim Rentschler, Jörg Eisenlohr, Volker BucherORCiDGND |
| DOI: | https://doi.org/10.34343/ijpest.2023.17.e02002 |
| ISSN: | 2435-0125 |
| Parent Title (English): | International Journal of Plasma Environmental Science and Technology : ISNTPT |
| Language: | English |
| Year of Completion: | 2023 |
| Release Date: | 2023/06/23 |
| Tag: | Fluorocarbon; HFC; PCB; Plasma etching; Printed circuit board |
| Volume: | 17.2023 |
| Issue: | 2 |
| Article Number: | e02002 |
| Page Number: | 19 |
| Open-Access-Status: | Open Access |
| Gold | |
| Licence (German): |  Urheberrechtlich geschützt |