Inchworm Motors and Beyond: A Review on Cooperative Electrostatic Actuator Systems
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| Document Type: | Article (peer-reviewed) |
|---|---|
| Author: | Almothana Albukhari, Ulrich MeschederORCiDGND |
| URN: | https://urn:nbn:de:bsz:fn1-opus4-93679 |
| DOI: | https://doi.org/10.3390/act12040163 |
| ISSN: | 2076-0825 |
| Parent Title (English): | Actuators |
| Language: | English |
| Year of Completion: | 2023 |
| Release Date: | 2023/04/14 |
| Tag: | Cooperative actuators; Electrostatic actuator; Electrostatic motor; Inchworm motor; Microsystems |
| Volume: | 12.2023 |
| Issue: | 4 |
| Article Number: | 163 |
| First Page: | 38 |
| Open-Access-Status: | Open Access |
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| Licence (German): |  Creative Commons - CC BY - Namensnennung 4.0 International |