Laser-assisted grinding of Silicon Nitride by picosecond laser
| Document Type: | Doctoral Thesis |
|---|---|
| Author: | Babak Soltani |
| ISBN: | 978-3-8440-8747-5 |
| Publisher: | Shaker Verlag |
| Place of publication: | Düren |
| Advisor: | Bahman AzarhoushangORCiDGND |
| Language: | English |
| Year of Completion: | 2022 |
| Date of final exam: | 2022/07/13 |
| Release Date: | 2023/11/20 |
| Page Number: | 161 |
| Note: | Dissertation, Albert-Ludwigs-Universität Freiburg im Breisgau, 2022 |
| Licence (German): |  Urheberrechtlich geschützt |